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All Fluoropolymer Filter Cartridge for Semiconductor Fabrication

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  • Description
  • Specification
  • Ordering Information

LET/LETL all fluoropolymer filter cartridges are constructed of PTFE membrane and PVDF components, especially developed for filtration in the semiconductor industry, offering high throughputs, high flow rates and long service life. Due to their features of superior chemical compatibility and oxidation resistance, they are ideal for the filtration of chemicals in the semiconductor fabrication processes, which include etching, cleaning, photoresist, developer, etc. and other high temperature, strong corrosive and oxidative solvents.
Features and Benefits
● Hydrophobic or Hydrophilic PTFE membrane, low extractable levels
● PVDF construction for good resistance to high temperature and oxidation
● No need to prewetting for hydrophilic PTFE membrane 
● Wide range of removal ratings
● High flow rates and long service life 
● Excellent chemical compatibility
Quality
● Cartridges produced in a controlled environment
● Manufactured according to ISO9001 certified Quality Management System

Specification

All Fluoropolymer Filter Cartridge for Semiconductor Fabrication

Material of  construction

Membrane

Hydrophobic  PTFE/Hydrophilic PTFE

Support  & Drainage

PVDF

Core & Cage

PVDF

End  Caps

PVDF

O-rings/Gasket

Viton/TEV

Sealing  Technology

Thermal  Bonding, No Adhesives 

Dimensions

Outer  Diameter

68mm (2.67 in)

Length

5”, 10”, 20”, 30”, 40”

Filtration Area

≥ 6.4 ft/10” (0.6 m/250mm)

Removal Ratings, μm

Hydrophobic PTFE0.05, 0.1, 0.22, 0.45,  1.0, 3.0, 5.0, 10

Hydrophilic PTFE: 0.1, 0.22, 0.45, 1.0

Maximum Operating  Temperature 

95/203

Maximum Forward Differential  Pressure

4.2 bar @ 23/60.9 psid @ 73.4

0.6  bar @ 95/8.7psid @ 203

 

Ordering Information

All Fluoropolymer Filter Cartridge for Semiconductor Fabrication

All Fluoride.jpg

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