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CNE-D Series Capsule Filter for Photoresist

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  • Description
  • Specification
  • Ordering Information

CNE-D capsule filters have compact design and excellent filtration performance, especially designed for small volume photoresist dispense applications where low hold-up volume and cleanliness are critical. Its minimal hold-up volume of fluids ensures minimum wastage. 
Features and Benefits
● Compact and sturdy construction    
● High pressure resistance  
● Low hold-up volume
● Minimized dead space 
● Disposable design, easy change-out 
Quality
● Capsules produced in a controlled environment
● Manufactured according to ISO9001 certified Quality Management System

Specification

CNE-D Series Capsule Filter for Photoresist

Material of  construction

Filter  Media

PTFE/PP  

Support  & Drainage

Polypropylene

Housing,  Core, Cage & End Caps

Polypropylene

Sealing  Technology

Thermal  Bonding, No Adhesives 

Connections

Inlet/Outlet

1/2”MNPT

Vent/Drain

1/4”MNPT

Filtration Area

≥ 1.1 ft(0.1 m2)

Removal Ratings, μm

PP: 0.1, 0.2, 0.45, 1.0, 3.0

Hydrophobic PTFE: 0.1, 0.2, 0.45, 1.0, 3.0

Maximum Operating  Temperature 

60140

Maximum Forward  Differential Pressure

Liquid: 3.5 bar @ 23 ℃, 3.0 bar@60℃ (50.8 psid@73.4 , 43.5 psid@140)

Air&Gas: 3.0 bar @ 23 ℃, 2.5 bar@60℃ (43.5 psid@73.4 , 36.3 psid@140)

 

Ordering Information

CNE-D Series Capsule Filter for Photoresist

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