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CNE Series Capsule Filter for Semicon

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  • Description
  • Specification
  • Ordering Information

CSE capsule filters are compact capsule assemblies. They are ideally suited for the filtration of developer, etchant and DI water in today’s semiconductor fabrication processes, as well as for the filtration of small volume batch chemicals. 
Features and Benefits
● Compact and sturdy construction    
● High pressure resistance  
● Low hold-up volume
● O-ringless design
● Disposable design, easy change-out 
Quality
● Capsules produced in a controlled environment
● Manufactured according to ISO9001 certified Quality Management System

Specification

CNE Series Capsule Filter for Semicon

Material of  construction

Filter  Media

Please  refer to ordering information 

Support  & Drainage

Polypropylene

Housing,  Core, Cage & End Caps

Polypropylene

Sealing  Technology

Thermal  Bonding, No Adhesives 

Connections

Inlet/Outlet

1/4”SWG

Vent/Drain

1/8”SWG

Filtration Area

2.5”

≥ 1.1 ft(0.1 m2)

Removal Ratings, μm

PP: 0.1, 0.2, 0.45, 0.65, 1.0, 3.0, 5.0, 10, 20

PES: 0.1, 0.22, 0.45, 0.65,  0.8, 1.2

Nylon: 0.1, 0.22, 0.45, 1.0,  3.0, 5.0

Hydrophobic PTFE: 0.05, 0.1,  0.22, 0.45, 1.0

Hydrophilic PTFE: 0.1, 0.22,  0.45, 1.0

Hydrophobic PTFE for air:  0.01

Glass Fiber: 0.45, 1.0, 3.0,  5.0

PVDF: 0.1, 0.22, 0.45, 1.0,  3.0, 5.0

Maximum Operating  Temperature 

60140

Maximum Forward  Differential Pressure

Liquid: 3.5 bar @ 23 ℃, 3.0 bar@60℃ (50.8 psid@73.4 , 43.5 psid@140)

Air&Gas: 3.0 bar @ 23 ℃, 2.5 bar@60℃ (43.5 psid@73.4 , 36.3 psid@140)

 

Ordering Information

CNE Series Capsule Filter for Semicon

CNE.jpg

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