LENN Series Filter Cartridge for Semiconductor Fabrication

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Description
Specification
Ordering Information

LENN filter cartridges are constructed of naturally hydrophilic Nylon membrane and PP components, especially developed for filtration in the semiconductor industry. They can provide low extractables, high adsorption and good mechanical strength. They are ideal for filtration of DI water in advanced semiconductor manufacturing, filtration of photoresist, developer and solvents in semiconductor fabrication.
Features and Benefits
● Naturally hydrophilic Nylon membrane
● Low extractables and high adsorption
● High flow rates
Quality
● Cartridges produced in a controlled environment
● Manufactured according to ISO9001 certified Quality Management System

Specification

LENN Series Filter Cartridge for Semiconductor Fabrication

Material of construction
Membrane	Hydrophilic Nylon66
Support & Drainage	PP
Core & Cage	PP
End Caps	PP
O-rings/Gasket	Silicone/EPDM/Viton/TEV
Sealing Technology	Thermal Bonding, No Adhesives
Dimensions
Outer Diameter	68mm (2.67 in)
Length	5”, 10”, 20”, 30”, 40”
Filtration Area
≥ 6.4 ft²/10” (0.6 m²/250mm)
Removal Ratings, μm
0.1, 0.22, 0.45, 1.0, 5.0, 10
Maximum Operating Temperature
A: PP＜60℃（140℉） B: PP with stainless steel lined end cap＜85℃/185℉ C: PP with stainless steel lining＜95℃/203℉
Maximum Forward Differential Pressure
4.2 bar @ 23 ℃/60.9 psid @ 73.4℉ 1.5bar@85 ℃/21.7 psid @ 185℉ 0.6 bar @ 95 ℃/8.7psid @ 203℉

Ordering Information

LENN Series Filter Cartridge for Semiconductor Fabrication