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LENN filter cartridges are constructed of naturally hydrophilic Nylon membrane and PP components, especially developed for filtration in the semiconductor industry. They can provide low extractables, high adsorption and good mechanical strength. They are ideal for filtration of DI water in advanced semiconductor manufacturing, filtration of photoresist, developer and solvents in semiconductor fabrication.
Features and Benefits
● Naturally hydrophilic Nylon membrane
● Low extractables and high adsorption
● High flow rates
Quality
● Cartridges produced in a controlled environment
● Manufactured according to ISO9001 certified Quality Management System
LENN Series Filter Cartridge for Semiconductor Fabrication
Material of construction | |
Membrane | Hydrophilic Nylon66 |
Support & Drainage | PP |
Core & Cage | PP |
End Caps | PP |
O-rings/Gasket | Silicone/EPDM/Viton/TEV |
Sealing Technology | Thermal Bonding, No Adhesives |
Dimensions | |
Outer Diameter | 68mm (2.67 in) |
Length | 5”, 10”, 20”, 30”, 40” |
Filtration Area | |
≥ 6.4 ft2 /10” (0.6 m2 /250mm) | |
Removal Ratings, μm | |
0.1, 0.22, 0.45, 1.0, 5.0, 10 | |
Maximum Operating Temperature | |
A: PP<60℃(140℉) B: PP with stainless steel lined end cap<85℃/185℉ C: PP with stainless steel lining<95℃/203℉ | |
Maximum Forward Differential Pressure | |
4.2 bar @ 23 ℃/60.9 psid @ 73.4℉ 1.5bar@85 ℃/21.7 psid @ 185℉ 0.6 bar @ 95 ℃/8.7psid @ 203℉ |
LENN Series Filter Cartridge for Semiconductor Fabrication