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LET/LETL Series Filter Cartridge for Semiconductor Fabrication

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  • Description
  • Specification
  • Ordering Information

LET/LETL filter cartridges are characterized by PTFE membrane and PP components, especially developed for filtration in the semiconductor industry. They can offer high throughputs, high flow rates, long service life and superior chemical compatibility. They are ideal for the filtration of chemicals in the semiconductor fabrication processes, which include etching, cleaning, photoresist, developer, recommended for chemicals which are compatible with PTFE and polypropylene.
Features and Benefits
● Hydrophobic or Hydrophilic PTFE membrane, low extractable levels
● No need to prewetting for hydrophilic PTFE membrane
● Wide range of removal ratings, absolute constructions with high particle retention 
● High flow rates and long service life
● Excellent chemical compatibility
Quality
● Cartridges produced in a controlled environment
● Manufactured according to ISO9001 certified Quality Management System

Specification

LET/LETL Series Filter Cartridge for Semiconductor Fabrication

Material of  construction

Membrane

Hydrophobic  PTFE/Hydrophilic PTFE

Support  & Drainage

PP

Core & Cage

PP

End  Caps

PP

O-rings/Gasket

Silicone/EPDM/Viton/TEV

Sealing  Technology

Thermal  Bonding, No Adhesives 

Dimensions

Outer  Diameter

68mm (2.67 in)

Length

5”, 10”, 20”, 30”, 40”

Filtration Area

≥ 6.4 ft/10” (0.6 m/250mm)

Removal Ratings, μm

Hydrophobic PTFE0.05, 0.1, 0.22, 0.45,  1.0, 3.0, 5.0, 10

Hydrophilic PTFE: 0.1, 0.22, 0.45, 1.0

Maximum Operating  Temperature 

A:  PP60140

B:  PP with stainless steel lined end cap85/185

C:  PP with stainless steel lining95/203

Maximum Forward  Differential Pressure

4.2 bar @ 23 ℃/60.9 psid @ 73.4

1.5bar@85 ℃/21.7 psid @ 185

0.6  bar @ 95 ℃/8.7psid @ 203

 

Ordering Information

LET/LETL Series Filter Cartridge for Semiconductor Fabrication

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