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All Fluoropolymer Filter Cartridges for CMP Slurry Filtration

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  • Description
  • Specification

LET/LETL all fluoropolymer filter cartridges are constructed of PTFE membrane and PVDF components, offering high throughputs, high flow rates and long service life. Due to their characteristics of superior chemical compatibility and oxidation resistance, they are ideally suited for the filtration of chemicals in the CMP slurry systems of semiconductor fabrication processes and other high temperature, strong corrosive and oxidative solvents.
Features and Benefits
● Hydrophobic or Hydrophilic PTFE membrane, low extractable levels
● PVDF construction for good resistance to high temperature and oxidation
● No need to prewetting for hydrophilic PTFE membrane 
● Available in various removal ratings 
● High flow rates and long service life 
● Excellent chemical compatibility
Quality
● Cartridges produced in a controlled environment
● Manufactured according to ISO9001 certified Quality Management System

Specification

All Fluoropolymer Filter Cartridges for CMP Slurry Filtration

Material of  construction

Membrane

Hydrophobic  PTFE/Hydrophilic PTFE

Support  & Drainage

PVDF

Core & Cage

PVDF

End  Caps

PVDF

O-rings/Gasket

FKM/E-FKM

Sealing  Technology

Thermal  Bonding, No Adhesives 

Dimensions

Outer  Diameter

68mm (2.67 in)

Length

5”, 10”, 20”, 30”, 40”

Filtration Area

≥ 6.4 ft/10” (0.6 m/250mm)

Removal Ratings, μm

Hydrophobic PTFE0.05, 0.1, 0.22, 0.45,  1.0, 3.0, 5.0, 10

Hydrophilic PTFE: 0.1, 0.22, 0.45, 1.0

Maximum Operating  Temperature 

95/203

Maximum Forward  Differential Pressure

4.2 bar @ 23/60.9 psid @ 73.4

0.6  bar @ 95/8.7psid @ 203

 

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