CNE Series Capsule Filter for CMP Slurry Filtration

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Description
Specification
Ordering Information

CNE capsule filters are compact capsule assemblies. They are developed for the filtration of a broad range of slurries and DI water in the CMP slurry systems, as well as for the filtration of small volume batch chemicals.
Features and Benefits
● Compact and sturdy construction
● High pressure resistance
● Low hold-up volume
● O-ringless design
● Disposable design, easy change-out
Quality
● Capsules produced in a controlled environment
● Manufactured according to ISO9001 certified Quality Management System

Specification

CNE Series Capsule Filter for CMP Slurry Filtration

Material of construction
Filter Media	Please refer to ordering information
Support & Drainage	Polypropylene
Housing, Core, Cage & End Caps	Polypropylene
Sealing Technology	Thermal Bonding, No Adhesives
Connections
Inlet/Outlet	1/4”MNPT
Vent/Drain	1/8”MNPT
Filtration Area
2.5”	≥ 1.1 ft²(0.1 m²)
5”	≥ 2.2 ft²(0.2 m²)
10”	≥ 3.4 ft²(0.3 m²)
Removal Ratings, μm
PP: 0.1, 0.2, 0.45, 0.65, 1.0, 3.0, 5.0, 10, 20 PES: 0.1, 0.22, 0.45, 0.65, 0.8, 1.2 Nylon: 0.1, 0.22, 0.45, 1.0, 3.0, 5.0 Hydrophobic PTFE: 0.05, 0.1, 0.22, 0.45, 1.0 Hydrophilic PTFE: 0.1, 0.22, 0.45, 1.0 Hydrophobic PTFE for air: 0.01 Glass Fiber: 0.45, 1.0, 3.0, 5.0 PVDF: 0.1, 0.22, 0.45, 1.0, 3.0, 5.0
Maximum Operating Pressure
Liquid: 3.5 bar @ 23 ℃, 3.0 bar@60℃ (50.8 psid@73.4 ℉, 43.5 psid@140℉) Air&Gas: 3.0 bar @ 23 ℃, 2.5 bar@60℃ (43.5 psid@73.4 ℉, 36.3 psid@140℉)

Ordering Information

CNE Series Capsule Filter for CMP Slurry Filtration