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LETL Series Filter Cartridge for CMP Slurry Filtration

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  • Description
  • Specification

LETL filter cartridges are constructed of hydrophilic PTFE membrane and PP components, offering high throughputs, no need to prewetting, long service life and superior chemical compatibility. The filters are ideally suited for the filtration of DI water and some aqueous solutions in the CMP slurry systems.
Features and Benefits
● No need to prewetting
● Low extractable levels, no fiber releasing 
● High throughputs and long service life 
● Excellent chemical compatibility
Quality
● Cartridges produced in a controlled environment
● Manufactured according to ISO9001 certified Quality Management System

Specification

LETL Series Filter Cartridge for CMP Slurry Filtration

Material of  construction

Membrane

Hydrophilic  PTFE

Support  & Drainage

PP

Core & Cage

PP

End  Caps

PP

O-rings/Gasket

Silicone/EPDM/FKM/E-FKM

Sealing  Technology

Thermal  Bonding, No Adhesives 

Dimensions

Outer  Diameter

68mm (2.67 in)

Length

5”, 10”, 20”, 30”, 40”

Filtration Area

≥ 6.4 ft/10” (0.6 m/250mm)

Removal Ratings, μm

0.1, 0.22, 0.45, 1.0

Maximum Operating  Temperature 

A:  PP60140

B:  PP with stainless steel lined end cap85/185

C:  PP with stainless steel lining95/203

Maximum Forward  Differential Pressure

4.2 bar @ 23 ℃/60.9 psid @ 73.4

1.5bar@85 ℃/21.7 psid @ 185

0.6  bar @ 95 ℃/8.7psid @ 203

 

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